Hard Magnetic Material for Perpendicular Magnetic Anisotropic Field in Electromagnetic Actuator Fabrication
نویسندگان
چکیده
منابع مشابه
Hard Magnetic Material for Perpendicular Magnetic Anisotropic Field in Electromagnetic Actuator Fabrication
This paper describes a high power electromagnetic microactuator fabrication method that combines the hard magnetic Fe/Pt process, Ni/Fe permalloy magnetic circuit design, bulk micromachining, and excimer laser ablation. The hard magnetic material Fe/Pt is deposited under low temperature less than 300◦C by sputter onto a suspension diaphragm to produce a perpendicular magnetic anisotropic field....
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ژورنال
عنوان ژورنال: PIERS Online
سال: 2005
ISSN: 1931-7360
DOI: 10.2529/piers041130134857